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UHP-UHV SEALS

UHP-UHV SEALS
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UHP-UHV SEALS

Product catalog summary
Introduction
Technetics Group, in partnership with the French Atomic Energy Commission, has developed advanced metal seals for Ultra-High Purity (UHP) and Ultra-High Vacuum (UHV) applications. These include HELICOFLEX® DELTA, Metal O-ring, Quick Disconnect Systems (QDS), HELICOFLEX®, and Metal C-ring. The HELICOFLEX® DELTA seal is distinguished by its low load requirement, excellent sealing on smooth surfaces, and minimal helium leak rate.
Key Features
  • Ultra-low Leak Rates (< 1x10-13 atm.cm3.s-1 He)
  • Low Outgassing
  • Cryogenic Temperatures (< 1.8° K)
  • Long Life Expectancy
  • Chemical Compatibility
  • High Temperature Bake Out
  • Radiation Resistance
Typical Applications
  • Accelerators/Fusion Research: Quartz Windows, Ceramic Flanges, RF Waveguide Connections
  • PVD/CVD/ETCH Equipment: Flange Connections, UHV Pump/Chamber Connections
  • Gas/Chemical Delivery Systems: Modular Gas Systems, Mass Flow Controllers
Sealing Concept
The HELICOFLEX® seals function through the plastic deformation of a ductile jacket between a flange and an elastic core with a helical spring, allowing the seal to adapt to flange surface irregularities for a reliable seal.
Technical Data
  • Dimensions: Ø 3.8 to Ø 2000mm
  • Temperature Range: -272 to 700°C
  • Helium Sealing Level: Q ≤ 10-13 atm cm3 s-1
Characteristic Curve
The HELICOFLEX® DELTA seal shows resilient characteristics, enabling elastic recovery during service and accommodating minor distortions due to temperature cycling.
Design Information
  • Jacket Seal Design: Various materials including Aluminum, Silver, Nickel, and Copper with specific compression and helium sealing requirements.
  • Groove Design: Recommendations for groove dimensions and surface finish for optimal sealing performance.
Standard Sizes and Applications
HELICOFLEX® seals are available in various standard sizes and can be used to upgrade CF flanges, even with damaged knife edges.
Conclusion
Technetics Group's advanced sealing solutions provide reliable performance for critical UHP/UHV and cryogenic applications, focusing on durability, compatibility, and minimal leakage.
Specifications
The document details specifications for copper seals and Quick Disconnect Systems (QDS). Copper seals are designed for high-temperature applications up to 450°C/842°F and are available in various nominal diameters with specific cross-section and compression values. Dimensions for seals and flanges, including inside and outside diameters, are specified.
Materials and Construction
Copper seals are made from oxygen-free copper, offering good parallelism and oxidation resistance. They can be used with bolted, welded, or slip-on flanges. QDS components are available in aluminum and stainless steel, with non-magnetic options for side-plates and screws.
Technical Data
QDS Class 150 and Class 300 are detailed with clamping loads of 150 N/mm and 300 N/mm, respectively, and maximum temperatures of 200°C and 300°C. Specific dimensions for clamps and flanges, with maximum pressure and torque values, are provided.
Recommendations
Consultation with Technetics Group engineering staff is recommended for specific applications, especially for flange dimensions and custom modifications. The document emphasizes verifying technical data with the company before use.
Contact Information
Contact details for Technetics Group offices in France, Germany, the UK, the USA, and Asia are provided, encouraging users to reach out for more information or specific technical data.
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Catalog excerpts

UHP-UHV SEALS-1

ULTRA HIGH PURITY & ULTRA HIGH VACUUM SEALS Advanced metal sealing solutions for critical UHP/UHV & cryogenic applications

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UHP-UHV SEALS-2

Today's sealing requirements for Ultra-High Purity and ULtra-Hic • ULtra-Low Leak Rates (< 1x10-13 atm.cm3.s-1 He) • Low Outgassing • Cryogenic Temperatures(< 1.8° K) • Long Life Expectancy • Chemical Compatibility • Aluminum Flanges Through extensive research, Technetics Group, in conjuction wi of high performance metaL seals to solve these demanding app Vacuum are more demanding than ever before: • Odd Shapes & Sizes • High Temperature Bake Out • Radiation Resistance • Remote Handling Capability • Quartz & Ceramic Flanges • Reduced Load the French Atomic Energy Commission, has deveLoped...

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UHP-UHV SEALS-3

The sealing principle of the HELICOFLEX® family of seals is based upon the plastic deformation of a jacket that has greater ductility than the flange materials. This occurs between the sealing face of a flange and an elastic core composed of a close-wound helical spring. The spring is selected to have a specific compression resistance. During compression, the resulting specific pressure forces the jacket to yield and ensures positive contact with the flange sealing faces. Each coil of the helical spring acts independently and allows the seal to conform to irregularities on the flange surface....

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UHP-UHV SEALS-4

HELICOFLEX® DELTA A SEAL JACKET SEAL DESIGN INFORMATION Other materials are available on request: Stainless Steel, Inconel, Tantalum, Gold, etc. Note: Minimum temperature is 1.8K/-272°C. Maximum temperatures shown in the tables only relate to the characteristics of the seal and are to be checked for every type of fluid. In specific applications, the HELICOFLEX® DELTA can be used with a seating load as low as 80 N/mm (450 lb/in). TECHNETICS GROUP Phone: +33 (0) 4 77 43 51 00 90, rue de la Roche du Geai [email protected] 42029 Saint Etienne cedex 1 FRANCE

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UHP-UHV SEALS-5

SHAPED SEALS Groove Design: Contact our engineering staff for assistance in designing non-circular grooves. Groove Finish: Most UHP/UHV applications will require a finish of <16 RMS (<0.4 Ra pm). All machining & polishing marks must follow seal circumference. Min. Seal Radius: The minimum seal bending radius is six times the seal cross section (CS). Seating Load: The load (Y2) to seat the seal is approximately 30% higher due to a slightly stiffer spring design. 90, rue de la Roche du Geai CS 52913 42029 Saint Etienne cedex 1 FRANCE liachnebcs [email protected] technetics.com GROUP EnPro Industries...

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UHP-UHV SEALS-6

COMPRESSION AND DECOMPRESSION CYCLE The compression and decompression cycle of the HELICOFLEX® seal is characterized by gradual flattening of the compression curve.The decompression curve is distinct from the compression curve as the result of a hysteresis phenomenon to which is added a permanent dual deformation (spring deformation and lining creep). DEFINITION OF TERMS Please refer to page 3. Cross Compression Section e, * Helium Sealing Maximum Temperature Maximum Temperature Maximum Temperature *Please refer to page 3. IN ULTRA HIGH VACUUM APPLICATIONS The sealing performance is very...

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UHP-UHV SEALS-7

STANDARD SIZES HELICOFLEX® SEAL, TYPE HN 100 AND 200 Lining: Aluminum - Silver - Copper - Armco - Nickel - Stainless steel Spring: Ø < 250° C - Steel - Stainless steel Ø ≥ 250° C - High Temperature Alloy Dimensions in mm. Upon request Tolerances ø A : H15007 to H 15027 = ± 0,2 - H15028 to H15064 = ± 0,25 - H15065 to H 15088 = ± 0,3 Permanent stock, HN100 aluminum lining, High Temperature Alloy spring up to 15052. TECHNICAL DATA FKM O-RING O-rings are made by synthetic elastomer molding in the shape of a circular section torus. They are assembled in a groove or with a center ring. Helium sealing...

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UHP-UHV SEALS-8

KF/ISO/PNEUROP STANDARD Typical assembly examples with HELICOFLEX® or HELICOFLEX® Delta Different types of seal HNV 200 with spacer without spacer TYPICALS ASSEMBLY EXAMPLES without spacer Collar coupling Threaded coupling Clamped flanges Bolted flanges Bolted flanges Mixed bolted & clamped flanges Mixed bolted & clamped flanges TECHNETICS GROUP EnPro Industries companies 90, rue de la Roche du Geai CS 52913 42029 Saint Etienne cedex 1 FRANCE [email protected] technetics.com with spacer without spacer with spacer without spacer

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UHP-UHV SEALS-9

HELICOFLEX® SEALS FOR CF FLANGE UPGRADE HELICOFLEX® seals can upgrade the performance of your CF flange - even with damaged knife edges. Nominal Diameter ND GROOVE DESIGN INFORMATIONCross Section Compression C.S. e. Helium Seal Dimensions Sealing Outside Diameter mm Knife Edge Diameter D mm Note: Other dimensions available on request. 90, rue de la Roche du Geai CS 52913 42029 Saint Etienne cedex 1 FRANCE iGchncztics [email protected] technetics.com GROUP EnPro Industries companies

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UHP-UHV SEALS-10

QDS CLASS 150 Material: • Aluminum • Non-magnetic side-plates • Non-magnetic stainless steel screws Technical Data: • Clamping load: 150 N/mm (860 lb/in) • Temperature: 200°C (392°F) max. 90, rue de la Roche du Geai [email protected] 42029 Saint Etienne cedex 1 FRANCE

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UHP-UHV SEALS-11

Example reference for flange part number: 150 KF 40 ND 25 S: 2. Name of the conical flange: KF 3. Outside diameter of the flange: 40 5. Length of the flange: Short (25mm) or Long (50mm) 6. Blind flanges are described by the flange reference preceded by a T. Example: T 150 KF 40. Compatible with class 150 and class 300 QDS clamps for ISO sizes up to ND 50. Consult our enginering staff for larger sizes. Standard material Z2CN18.10 (304 L) SEAL DIMENSIONS - ALUMINUM JACKET Other jacket materials available upon request. FLANGE DIMENSIONS THE TECHNICAL DATA CONTAINED HEREIN IS BY WAY OF EXAMPLE AND...

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UHP-UHV SEALS-12

305 Fentress Boulevard Daytona Beach, FL 32114 USA Phone: +1-386-253-0628 Fax: +1-386-257-0122 1700 E. International Speedway Blvd DeLand, FL 32724 USA Phone: +1-386-736-7373 Fax: +1-386-738-4533 1600 Industry Road Hatfield, PA 19440 USA Phone: +1-800-618-4701 Fax: +1-215-855-3570 10633 W Little York, Bldg 3, Suite 300 Houston, TX 77041 USA Phone: +1-713-983-4201 Fax: +1-713-466-3721 10 Old Webster Road Oxford, MA 01540 USA Phone: +1-508-987-5900 990 Richard Avenue, Suite 117 Santa Clara, CA 95050 USA Phone: +1-669-242-8804 Fax: +1-669-242-8492 TECHNETICS GROUP EnPro Industries companies [email protected] technetics.com...

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