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EddyCus® TF lab 2020
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EddyCus® TF lab 2020 - 1

Efficient Testing Solutions Quragus Sensors & Instruments Non-Contact Sheet Resistance Tester DATA SHEET - EddyCus® TF lab 2020 series APPLICATIONS > Architectural glass (LowE) > Touch screens & flat monitors > OLED & LED applications > Smart-glass applications > Transparent antistatic foils > Photovoltaics > Semiconductors > De-icing & heating applications > Batteries & fuel cells > Packaging materials ■ Contact-free & real-time ■ Accurate single-point measurement of sheet resistance for conductive thin films (Ohm/sq) ■ Layer thickness measurement of metal films (nm) ■ Layer and substrate thickness monitoring (pm) ■ Characterization of multilayer systems on request ■ Manual mapping of sheet resistance guided by an easy-to-handle software

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EddyCus® TF lab 2020 - 2

EddyCus® TF lab 2020 series Sheet resistance measurement technology Substrates Substrate area Non-contact eddy current sensor e.g. foil, glass, wafer, etc. 8 inch / 204 x 204 mm (open to three sides) Max. sample thickness/sensor gap(defines distances) 1 / 2 / 5 / 10 / 25 mm (defined by the thickest sample / application) Sheet resistance range Thickness measurement range of metal films (e.g. Cu, Al) Device dimension (w/h/d) Weight Available future Sheet resistance measurement / metal thickness tester SOFTWARE & HANDLING - EddyCus® TF lab Control EddyCus® TF lab Control File Measurement...

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