Non-Contact Inline Sheet Resistance Measurement Solutions DATA SHEET - EddyCus® TF inline series APPLICATIONS > Architectural glass (LowE) > Packaging materials > Touch Panel Sensors & displays > Photovoltaic > Mirror coatings > Capacitor coatings > OLED & LED applications > Smart-glass applications > Transparent antistatic foils > Metallization in Semiconductor Industries > De-icing & heating applications > Batteries & fuel cells HIGHLIGHTS ■ Contact-free & real-time ■ Accurate measurement ■ Sheet resistance of thin films (Ohm/sq) ■ Layer thickness of metal films (nm/ qm) ■ Metal foil thickness measurement [qm) ■ High degree of variability and flexibility ■ In- and ex-vacuo solutions ■ Fixed sensor and traversing solutions ■ Single-lane and multi-lane solutions ■ Sensor sizes: S / M / L according space requirements ■ High sample rate up to 1.000 measurement/ s and hardware trigger ■ Comprehensive software with user friendly GUI, SQL database, statistics and export functions • Direct communication with sensors

DATA SHEET EddyCus® TF inline series – Inline Sheet Resistance Measurement EddyCus® TF inline series Sheet resistance and metal film thickness measurement technology Non-contact eddy current sensor e.g. foils, glass, wafer Number of sensor pairs/monitoring lanes Substrate thickness measurement for non-conductive substrates Ultrasonic, capacitive or optical sensor on request Metals/TCOs/CNTs/nanowires/graphene/grids/other Conductive layers 0.0001 – 10 Ohm/sq < 2 % accuracy 10 – 100 Ohm/sq < 3 % accuracy 100 – 1.000 Ohm/sq < 5 % accuracy Sheet resistance range covered by every sensor Ex-vacuo/...