EddyCus® TF inline SR
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Efficient Tes�ng Solu�ons EddyCus® TF inline SR – Sheet Resistance Monitoring System Sensor Series Sheet resistance (Ohm/sq) Accurate measurement Metal layer thickness (nm, µm) High degree of versa�lity and flexibility Metal substrate thickness (µm) Fixed sensor and traverse solu�ons Single-lane and mul�-lane solu�ons Integrity assessment SURAGUS GmbH Maria-Reiche-Strasse 1 01109 Dresden Germany For further ques�ons: +49 351 32 111 520 High sample rate up to 1,000 measurements per second Architectural glass (LowE) Metal films and meshes Touch screens and flat monitors Conduc�ve oxides Nanowire films Transparent an�sta�c foils Printed films Conduc�ve polymers (PEDOT:PSS) Other conduc�ve films and materials Ba�eries and fuel cells Packaging materials

EddyCus® TF inline SR – Sheet Resistance Monitoring System Measurement technology Non-contact eddy current sensor Boules, ingots, wafer, foils, glass, etc. Number of sensor pairs / monitoring lanes Conduc�ve layers Metals/ TCOs/ CNTs/ nanowires/ graphene/ grids/ PEDOT/ others Thickness measurement of metal films (e.g. Al, Ag, Mo, Ag paste) 1 nm – 2 mm (in accordance with sheet resistance) Other integrated measurements Metal thickness / op�cal transmi�ance / density / anisotropy Ex-vacuo / in-vacuo @ T < 60°C / 140°F (higher on request) Sample rate Hardware trigger UDP, .Net libraries, TCP,...