EddyCus® TF inline SR

Product catalog summary

Overview: The EddyCus® TF inline SR is a sheet resistance monitoring system designed for efficient and accurate measurement of conductive materials. It offers contact-free, real-time monitoring with high versatility and flexibility, suitable for both in-vacuo and ex-vacuo environments.

Key Features:

Contact-free and real-time measurement capabilities.
High sample rate up to 1,000 measurements per second.
Versatile solutions including fixed sensor and traverse options, as well as single-lane and multi-lane configurations.

Applications: The system is applicable in various fields such as architectural glass, touch screens, OLEDs, smart-glass, photovoltaics, semiconductors, and more.

Technical Specifications:

Measurement technology: Non-contact eddy current sensor.
Substrates: Boules, ingots, wafers, foils, glass, etc.
Measurement gap sizes: 3 to 50 mm (custom sizes available).
Sensor sizes: Sensor M (80 x 100 x 66 mm), Sensor S (34 x 48 x 117 mm).
Conductive layers: Metals, TCOs, CNTs, nanowires, graphene, grids, PEDOT, others.
Thickness measurement range: 1 nm to 2 mm.
Environment: Suitable for ex-vacuo and in-vacuo conditions at temperatures below 60°C (higher temperatures available on request).

Device Control and Software:

Multiple user views and levels with live monitoring and alarm functions.
Analysis view for statistical data.
Data storage in SQL database with customizable export options.
Smart functions like automated database cleaning and self-referencing.

Measurement Ranges and Accuracy:

VLSR (Very Low Sheet Resistance): 0.0001 – 0.1 Ohm/sq, Accuracy ± 1%.
LSR (Low Sheet Resistance): 0.01 – 10 Ohm/sq, Accuracy ± 1 – 3%.
MSR (Medium Sheet Resistance): 0.1 – 100 Ohm/sq, Accuracy ± 1%.
HSR (High Sheet Resistance): 10 – 2,000 Ohm/sq.
VHSR (Very High Sheet Resistance): 1,000 – 200,000 Ohm/sq.

Contact Information: SURAGUS GmbH, Maria-Reiche-Strasse 1, 01109 Dresden, Germany. Phone: +49 351 32 111 520. Website: www.suragus.com

Catalog excerpts

Efficient Tes�ng Solu�ons EddyCus® TF inline SR – Sheet Resistance Monitoring System Sensor Series Sheet resistance (Ohm/sq) Accurate measurement Metal layer thickness (nm, µm) High degree of versa�lity and flexibility Metal substrate thickness (µm) Fixed sensor and traverse solu�ons Single-lane and mul�-lane solu�ons Integrity assessment SURAGUS GmbH Maria-Reiche-Strasse 1 01109 Dresden Germany For further ques�ons: +49 351 32 111 520 High sample rate up to 1,000 measurements per second Architectural glass (LowE) Metal films and meshes Touch screens and flat monitors Conduc�ve oxides Nanowire films Transparent an�sta�c foils Printed films Conduc�ve polymers (PEDOT:PSS) Other conduc�ve films and materials Ba�eries and fuel cells Packaging materials

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EddyCus® TF inline SR – Sheet Resistance Monitoring System Measurement technology Non-contact eddy current sensor Boules, ingots, wafer, foils, glass, etc. Number of sensor pairs / monitoring lanes Conduc�ve layers Metals/ TCOs/ CNTs/ nanowires/ graphene/ grids/ PEDOT/ others Thickness measurement of metal films (e.g. Al, Ag, Mo, Ag paste) 1 nm – 2 mm (in accordance with sheet resistance) Other integrated measurements Metal thickness / op�cal transmi�ance / density / anisotropy Ex-vacuo / in-vacuo @ T < 60°C / 140°F (higher on request) Sample rate Hardware trigger UDP, .Net libraries, TCP, Modbus,...

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EddyCus® TF inline SR

EddyCus® TF inline SR

Catalog excerpts

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