Data Sheet- EddyCus® TF inline Series
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Efficient Testing Solutions SURACUS®) Sensors & Instruments 1 Highlights ► Contact free and real time ► Accurate measurement ► High degree of variability and flexibility ► In-and ex-vacuo solutions ► Fixed sensor and traverse solutions ► Single-lane and multi-lane solutions ► High sample rate up to 1,000 measurements per second Applications ► Architectural glass (LowE) ► Touch screens and flat monitors ► OLED and LED applications ► Smart-glass applications ► Transparent antistatic foils ► Photovoltaics ► Semiconductors ► De-icing and heating applications Parameters ► Sheet resistance (Ohm/sq) ► Metal layer thickness (nm, |um) ► Metal substrate thickness (|um) ► Anisotropy ► Defects ► Integrity assessment Materials ► Metal films and meshes ► Conductive oxides ► Nanowire films ► Graphene, CNT, Graphite ► Printed films ► Conductive polymers (PEDOT:PSS) ► Other conductive films and materials SURAGUS GmbH Maria-Reiche-StraBe 1 01109 Dresden Germany +49 35132 111520 info@suragus.com www.suragus.com www.sheet-resistance-testing.com www.suragus.com/FAQ www.suragus.com/EddyCusInline Made and Engineered in Germany Innovation Award by Free State of Saxony 2013 1st Place ► Batteries and fuel cells ► Packaging materials

EddyCus® TF inline Series Sheet resistance measurement technology Non-contact eddy current sensor e.g. foils, glass, wafer, etc. Number of sensor pairs / monitoring lanes Conduc�ve layers Metals/ TCOs/ CNTs/ nanowires/ graphene/ grids/ PEDOT/ others Sheet resistance range accuracy can be op�mized over sheet resistance decade within a customer specified range Thickness measurement of metal films (e.g. Al, Ag, Mo, Ag paste) 2 nm - 2 mm (in accordance with sheet resistance) Other integrated measurements Metal thickness/ op�cal transparency /density /electrical anisotropy Ex-vacuo/ in-vacuo @ T...