Data Sheet- EddyCus® TF inline Series

Product catalog summary

Overview
The EddyCus® TF inline Series offers efficient testing solutions for measuring sheet resistance and metal layer thickness in various applications. It provides contact-free and real-time measurements with high accuracy and flexibility, suitable for both in-vacuo and ex-vacuo environments.

Key Features

Contact-free and real-time measurement capabilities.
High sample rate up to 1,000 measurements per second.
Flexible solutions with single-lane and multi-lane options.
Measurement gap sizes ranging from 5 mm to 75 mm.
Sensor sizes available in two dimensions: Sensor M (80 x 100 x 66 mm) and Sensor S (34 x 48 x 117 mm).

Applications

Architectural glass (LowE), touch screens, OLED and LED applications.
Smart-glass, transparent antistatic foils, photovoltaics, semiconductors.
De-icing and heating applications, batteries, fuel cells, packaging materials.
Metal films, conductive oxides, nanowire films, graphene, CNT, graphite.
Printed films and conductive polymers (PEDOT:PSS).

Measurement Capabilities

Sheet resistance range: Low (0.0001 - 10 Ohm/sq), Standard (0.01 - 1,000 Ohm/sq), High (10 - 100,000 Ohm/sq) with accuracy between 2% to 8%.
Thickness measurement of metal films from 2 nm to 2 mm.
Additional measurements include metal thickness, optical transparency, density, and electrical anisotropy.

Software and Handling

Sheet Resistance Analyzer 2.0 with non-contact eddy current sensor technology.
Live view with upper and lower limits and alarm functions.
Analysis view providing statistics and data storage into SQL database.
Customizable automatic data export in various formats (csv, txt, xls).
Smart functions like automated database cleaning and self-reference.

Technical Specifications

Environment: Ex-vacuo/in-vacuo at temperatures below 60°C (optionally up to 90°C).
Interfaces: UDP, .Net libraries, TCP, Modbus, analog/digital.
Hardware trigger options: 5, 12, 24 V.

Contact Information
SURAGUS GmbH, Maria-Reiche-Straße 1, 01109 Dresden, Germany. Phone: +49 351 32 111 520, Email: [email protected], Website: www.suragus.com

Catalog excerpts

Efficient Testing Solutions SURACUS®) Sensors & Instruments 1 Highlights ► Contact free and real time ► Accurate measurement ► High degree of variability and flexibility ► In-and ex-vacuo solutions ► Fixed sensor and traverse solutions ► Single-lane and multi-lane solutions ► High sample rate up to 1,000 measurements per second Applications ► Architectural glass (LowE) ► Touch screens and flat monitors ► OLED and LED applications ► Smart-glass applications ► Transparent antistatic foils ► Photovoltaics ► Semiconductors ► De-icing and heating applications Parameters ► Sheet resistance (Ohm/sq) ► Metal layer thickness (nm, |um) ► Metal substrate thickness (|um) ► Anisotropy ► Defects ► Integrity assessment Materials ► Metal films and meshes ► Conductive oxides ► Nanowire films ► Graphene, CNT, Graphite ► Printed films ► Conductive polymers (PEDOT:PSS) ► Other conductive films and materials SURAGUS GmbH Maria-Reiche-StraBe 1 01109 Dresden Germany +49 35132 111520 [email protected] www.suragus.com www.sheet-resistance-testing.com www.suragus.com/FAQ www.suragus.com/EddyCusInline Made and Engineered in Germany Innovation Award by Free State of Saxony 2013 1st Place ► Batteries and fuel cells ► Packaging materials

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EddyCus® TF inline Series Sheet resistance measurement technology Non-contact eddy current sensor e.g. foils, glass, wafer, etc. Number of sensor pairs / monitoring lanes Conduc�ve layers Metals/ TCOs/ CNTs/ nanowires/ graphene/ grids/ PEDOT/ others Sheet resistance range accuracy can be op�mized over sheet resistance decade within a customer specified range Thickness measurement of metal films (e.g. Al, Ag, Mo, Ag paste) 2 nm - 2 mm (in accordance with sheet resistance) Other integrated measurements Metal thickness/ op�cal transparency /density /electrical anisotropy Ex-vacuo/ in-vacuo @ T <...

Open the catalog to page 2

Data Sheet- EddyCus® TF inline Series

Data Sheet- EddyCus® TF inline Series

Catalog excerpts

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