MSA-600 Micro System Analyzer MSA-600 Micro System Analyzer Measuring dynamic response and topography of MEMS and microstructures Product brochure

Measuring dynamic response and topography of MEMS and microsystems Visualization of dynamic response and static characterization are key to testing and developing MEMS and other microstructures as e.g. micro acoustic transducers. They are important for validating FE calculations, determining crosstalk effects and measuring surface deformation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions. This instrument delivers measurement flexibility and precision, adapting to the testing...

The all-in-one solution Polytec’s MSA-600 Micro System Analyzer combines three highly sophisticated measuring techniques in one instrument. This provides comprehensive investigation of microstructures in a single workstation. Real-time vibration analysis R eal-time characterization of out-of-plane (OOP) vibrations by laser Doppler vibrometry to frequencies up to 2.5 GHz and with a displacement resolution down to the (sub-)picometer level Planar motion analysis Characterization and live-mode1 visualization of in-plane motion by stroboscopic video microscopy to frequencies up to 2.5 MHz and with...

Advancing microsystems of tomorrow Simplify model validation Validate and refine your FE simulations using highly precise experimental data. Laser Doppler vibrometers are established tools for quickly and reliably measuring the mechanical response of MEMS devices to electrical and physical stimuli. Non-contact optical measurement avoids any influence on the structure. Broadband measurement provides frequency response and transfer functions with excellent amplitude resolution. Optimize device functionality Measuring the real-time response behavior of a device allows to optimize operation and reliability....

Your MSA benefits for R&D and production applications apid identification and visualization of both R system resonances and static topography ntegrated optimized microscope for best I lateral resolution and highest image quality asy integration with MEMS/wafer E probe stations imple and intuitive operation, S ready to measure in a few minutes ncreased productivity through a I short measurement cycle ccelerates product development, A troubleshooting and time-to-market Test MEMS reliability and service life Verification of safety-related functions of new MEMS components needs to take place under...

Real-time vibration analysis Scanning laser Doppler vibrometry (SLDV) provides non-contact, real-time measurements of velocity and displacement on a grid of selected measurement points. This allows characterization of out-of-plane vibrational behavior. Unique features include the ability to acquire data with (sub-)picometer displacement resolution, to capture frequency response up to 2.5 GHz, and to analyze non-linear systems. Highlights Dynamic response (vibration) measurement of velocity and/or displacement Full-field vibration mapping and broadband, out-of-plane frequency response information...

Deflection shape of MEMS IR sensor (Melexis) Time domain visualization of RF-MEMS-SWITCH (IHP) FE model validation by LDV (FHG ENAS) Deflection shape of CMUT array (University of Alberta) PZT cantilever, detecting 240 fm resonance amplitude at 17.8 MHz PMUT, higher order vibration mode (UC Davis) Intuitive and powerful data analysis and evaluation Our built in signal analysis software provides frequency response over the entire frequency bandwidth without the need to know the resonance frequencies in advance. The intuitive software package provides a built in signal generator to drive the device...

Planar motion analysis Stroboscopic video microscopy provides a powerful method for the measurement and true motion visualization of the in-plane dynamics of microstructures. To precisely measure the planar motion of the device under test, a combination of stroboscopic illumination, digital imaging and pattern tracking is applied. Thus motions of fast moving objects can be sharply frozen in time to capture and track the exact position of a region of interest (ROI) on the specimen. Highlights CAMERA Easily measure and visualize in-plane motions TUBE LENS LED FLASH BEAM SPLITTER Extract displacement...

MEMS torsional actuator (SNL) In-plane motion of a combdrive (SNL) MEMS PCT bimorph actuator (TOHOKU University); laterally-driven PZT actuator with high aspect ratio PZT/Si/PZT structure Laser Doppler vibrometry combined with in-plane stroboscopy The combination of two complementary measurement techniques to investigate the vibrational behavior of small structures provides superior performance. The highly sensitive laser Doppler technique can rapidly find MEMS mass sensor (UCSB) Vibration relaxation of laterally-driven PZT actuator measured by stroboscopic video microscopy using Polytec MSA...

Surface topography analysis When designing or manufacturing microsystems, structured surfaces require precise verification of surface topography to assure quality and performance. Due to its excellent spatial resolution the Micro System Analyzer’s topography measurement unit is ideally suited for the 3D profile analysis of microstructures. Highlights CAMERA Analyze microstructures with excellent vertical and lateral resolution TUBE LENS Rapid, non-contact 3D topography measurement on rough (scattering) or smooth (specular) surfaces BEAM SPLITTER 3D topography, flatness, waviness, roughness, geometry...

Topography of automotive pressure sensors (Melexis) Measurement on a micro gearwheel (SNL) Displacement measurement on a micro flow sensor (UCL Microelectronics Laboratory) Surface topography and beam curl of a cantilever Surface topography of micro channels measured through glass 3D topography visualization of an electrostatic comb-drive (SNL)

Portal stand Analysis software Sensor head F ront-end with controller and data management system