MSA-100-3D Micro System Analyzer MSA-100-3D Micro System Analyzer 3D vibration measurement for MEMS & microsystems Product brochure

Because real life happens in 3D 3D deflection shape measurement of microstructues with pm resolution for both out-of-plane and in-plane motion mark the state-of-the art microscope based vibration measurement. 3D vibration measurements for microsystems The MSA-100-3D Micro System Analyzer is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry. This novel measurement instrument is based on heterodyne Mach-Zehnder interferometry...

Real-time measurement with high bandwidth Sub-pm displacement resolution for both out-of-plane and in-plane motion Single-point and full-field scanning measurements Frequency range up to 25 MHz The MSA-100-3D Micro System Analyzer solves many challenging development tasks. It is based on the directionally resolved analysis of the Doppler frequency shift of light backscattered from just a single laser beam impinging on a vibrating or moving object. Subpicometer amplitude resolution is achieved for both Out-Of-Plane (OOP) and In-Plane (IP) motion with a small laser spot resulting in high spatial...

Application areas MEMS sensors and actuators The primary direction of motion for many MEMS devices is defined by the principal plane of the device (in-plane, IP). Typical examples include inertial sensors such as accelerometers or gyroscopes. In another class of devices the principal direction of motion is perpendicular to the plane of the device (out-of-plane, OOP), typical examples are micro mirrors and mirror arrays, inkjet printing heads, microphones and pressure sensor membranes. However, in most cases the real performance cannot be characterized as either pure OOP or IP vibration. Instead,...

Data storage Precision micro mechanics A sophisticated non-contact 3D measurement technology like LDV helps to accomplish the engineering task to increase R/W head-positioning accuracy in hard disk drive (HDD) development to achieve higher storage density and better reliability. Precise time-domain data and various operational deflection shape measurements help to quickly verify new designs thus accelerating the development process. High precision micro mechanic components, assemblies and tools are essential elements in many industries ranging from semiconductor, medical, dental, watchmaking...

Models and accessories Intelligent software Either as single point or as full-field 3D scanning, the MSA-100-3D stands for flexibility with different bandwidth configurations for vibration measurement: H-Version up to 100 kHz M-Version up to 2.5 MHz V-Version up to 25 MHz Simple operation: The proven Polytec PSV scanning vibrometer software is the base and has been extended with powerful features for fast and highly productive 3D vibration measurement on micro structures. The automated video stitching function allows an easy extension of the scan area on larger structures. The support for the...

Intuitive visualization of 3D deflection shapes in PSV software The XY-positioning table with tip-tilt compensation, vibration isolated workstation and more extras enable comfortable work MSA-100-3D integrated in a vacuum probe station Stands and sample positioning Probe station compatibility A flexible mounting concept allows to install the MSA100 Sensor Head specifically to the application requirements, with either standard or portal stand mounting or installed on probe stations. Polytec stands are available on air-damped or actively-controlled vibration isolated tables and can also be installed...

Shaping the future since 1967 OM_PB_MSA-100-3D_E_42375 2019/05 - Technical specifications are subject to change without notice. High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn