W-Ti Sputtering Targets

Product catalog summary

Overview
Materion Advanced Materials Group specializes in high-quality Tungsten-Titanium (W-Ti) sputtering targets for thin film deposition. These targets are designed to produce low-defect, high-performance W-Ti thin films.

Target Specifications

Alloy Composition: 5 - 30% wt% Ti
Compositional Tolerance: Typically ±0.5wt%
Purity: Up to 99.999%
Grain Size: Typically <20μm
Form Factor: Up to 17.5" (450mm) diameter monolithic

Benefits

Low particulation rate due to low porosity and inclusion content.
High deposition uniformity from consistent grain size and phase structure.
Consistent performance over the target's lifetime.
Large lot sizes for consistency in large volume applications.
High purity suitable for demanding applications.
Surface engineered to minimize flaking and reduce wafer defects.

Features

Customized microstructure for low particulation and high uniformity.
High density (>98%) with minimal density variation (<±0.5%).
Low defect content with minimal porosity and inclusions.
Engineered surfaces to suppress secondary flaking.
High purity with low oxygen and alkali content.
Consistent grain sizes of less than 20μm.

Applications
Materion's W-Ti sputtering targets are used in wafer bumping, as diffusion barrier layers, and as capping layers in interconnect metallization.

Catalog excerpts

ADVANCED MATERIALS GROUP Tungsten - Titanium Sputtering Targets

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Tungsten-Titanium (W-Ti) Sputtering Targets Materion Advanced Materials Group is an industry leader in producing superior quality products for thin film deposition markets and a worldwide supplier for W-Ti material. Our high purity W-Ti sputtering targets are specifically developed to produce low defect and high performance W-Ti thin films. FEATURES Our W-Ti targets’ microstructure and phase structure are customized for low particulation, high uniformity conductive films. High density and low variability across the target ■ >98% bulk density ■ Less than <+/-0.5% density variation across targets Low...

Open the catalog to page 2

W-Ti Sputtering Targets

W-Ti Sputtering Targets

Catalog excerpts

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