Sputtering Targets11

Product catalog summary

Introduction
The document discusses the challenges and solutions related to sputtering targets used in thin film coating applications. It emphasizes the importance of high purity materials and precise engineering to ensure uniform and reproducible coatings.

The Challenge
Thin film coatings require specific process and material combinations to achieve uniformity and maximize tool uptime. The quality of PVD coatings depends on the source material, which should be high purity and have superior surface cleanliness to reduce spitting.

The Solution
The company offers a broad line of PVD products and services to address issues of uniformity, reproducibility, and purity. Key offerings include high purity sputtering targets, proprietary designs for extended target life, and innovative manufacturing technologies like VCT™ for fine-grained targets.

Benefits
Expertise in PVD allows the company to provide customized materials engineering support, advanced testing techniques, and cost-effective sputter target designs.

Precious Metals Management
Services include vacuum chamber parts cleaning, Twin Wire Arc Spray coatings, reclaim and recycling services, and flexible refine settlement options.

Sputtering Targets
Available materials include precious and non-precious metals, standard and custom exotic alloys, and ceramic targets. Available forms include large area targets, rotary or planar, and custom alloys.

Environmental Leadership
The company complies with state and federal regulations and holds certifications such as ISO 9001:2008, 14001:2004, and ISO 17025:2005.

OEM Platforms Supported
The company supports a wide range of OEM platforms including Oerlikon, Von Ardenne, NEXX, and others.

Related Services
Services include sputtering target bonding with various bonding techniques and precious metal refining with complete traceability.

Material Properties
The document includes a table listing various elements with their atomic number, sputter yield, density, and ion beam etch rate, providing critical data for material selection in sputtering processes.

Catalog excerpts

ADVANCED MATERIALS GROUP Sputtering Targets

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The Challenge Every thin film coating application requires a specific combination of process and material to produce uniform thin film coatings and maximize tool uptime.The quality of a physical vapor deposition (PVD) coating is largely dependent on the source material. High purity materials with superior surface cleanliness are preferred for their ability to reduce “spitting.” To ensure coatings with dependable. reproducible properties, the source material must be specially engineered with a precise alloy composition, refined grain size and consistent phase content. The Solution Our broad line...

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Materion ... Materials to Advance the World’s Technologies ■ Von Ardenne ■ Evatec ■ Temescal ■ Veeco ■ Metron (Varian) ■AJA ■ MRC (KDF) ■ CVC ■ Novellus (Varian) ■ Trikon ■ Unaxis ■Perkin Elmer SPUTTERING TARGETS Available Materials Precious metal & non-precious metal sputtering targets ■ Standard and custom exotic alloys ■ Ceramic and sputtering targets with customized chemistries Available Forms ■ Large area targets ■ Rotary or planar ■ Non-traditional materials ■ Custom alloys ■ Multiple shapes & sizes ■ Extended life designs ■ Ion Beam Deposition (IBD) Targets ■ Oerlikon ■ NEXX ■ Leybold ■...

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ADVANCED MATERIALS GROUP 2978 Main Street Buffalo, NY 14214 USA Phone: +1 800.3271355 [email protected] www.materion.com/advancedmaterials rnMATE R I O N MATERION ADVANCED MATERIALS GROUP is a global advanced materials and services company, dedicated to providing solutions that enable our customers' technologies and drive their growth. Our products include precious and non-precious specialty metals, precision optical filters, inorganic chemicals and powders, specialty coatings, specialty-engineered beryllium alloys, beryllium and beryllium composites, and engineered clad and plated...

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Sputtering Targets11

Sputtering Targets11

Catalog excerpts

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