*myaeroexpo

MEMS Materials

Product catalog summary

Introduction
The document discusses the challenges and solutions related to the development of materials for MEMS (Micro-Electro-Mechanical Systems) devices, focusing on the need for high-purity PVD (Physical Vapor Deposition) materials with precise stoichiometries.

Challenges
The next generation of MEMS devices demands PVD materials with higher purities and precise stoichiometries. These materials must be engineered to meet stringent film characteristics and uniformities, necessitating collaboration with a partner experienced in R&D for PVD alloys.

Solutions Offered by Materion
Materion provides customized products and capabilities to meet customer requirements in terms of purity, chemistry, deposition properties, and consistency. Key offerings include:

Market-leading sputtering targets in both precious and non-precious metals.
An R&D team with extensive experience in developing new alloys and compounds.
Robust manufacturing processes ensuring product cleanliness and reliability.

Benefits
Materion's expertise in semiconductor and thin film materials offers several advantages:

Leadership in supplying precious metals to the MEMS industry.
Development of high-purity and alloyed gold PVD materials.
Enhanced sputter target designs for extended life and reduced costs.
Full cycle precious metal management with flexible settlement options.
Manufacturing capabilities ensuring a constant supply chain for disaster recovery.

Sputtering Targets
Available materials include precious metals (Au, Ag, Pt, Pd, etc.) and non-precious metals (Cr, Ti, Ta, etc.), with custom alloys and magnetic materials. Targets are available in custom sizes and support all OEM platforms.

Evaporation Materials
Available materials include precious and non-precious metals, EVAPro® grade high-performance materials, and customizable purity levels up to 5N. Forms include pellets, slugs, and starter charges.

Full Cycle Precious Metal Management
Materion has 100 years of experience in refining, recycling, and recovering metals, offering services like vacuum chamber shield cleaning and Twin Wire Arc Spray (TWAS).

Environmental Leadership
All disposal procedures comply with state and federal regulations, with certifications including ISO 9001:2008, ISO 14001:2004, and ISO 17025:2005.

Conclusion
Materion Advanced Materials Group is a leader in microelectronic packaging, offering a wide range of products and services to support the semiconductor, MEMS, wireless, and LED markets.

Catalog excerpts

ADVANCED MATERIALS GROUP MEMS Materials

Open the catalog to page 1

The Challenge The increased performance and functionality of next generation MEMS devices will require PVD materials with even higher purities and more precise stoichiometries than those currently available. Furthermore, PVD materials will need to be highly engineered in order to meet the exacting film characteristics and uniformities required by the industry. The development of these critical materials will compel MEMS manufacturers to seek a partner from a strong R&D culture specializing in PVD alloys. This supplier should have extensive expertise in materials specifically developed for complex...

Open the catalog to page 2

Materion ... Materials to Advance the World’s Technologies Precious Metal Products SPUTTERING TARGETS Available Materials n Precious Metal • Au, Ag, Pt, Pd, Ru, Rh, Os, Ir • Standard & custom alloys n Non-precious Metal • Cr Ti, Ta, Cu, Al, Ni • Custom alloys n Sputtering Targets with Customized Chemistries such as PZT n Magnetic Materials • NiFe, CoNi, NiPt, FePt Available Forms n Custom Size Planar & Rotary Targets n Support all OEM Platforms n Extended Life Designs RELATED SERVICES n Sputtering Target Bonding n Custom Backing Plates n Plating Anodes n Security Audits EVAPORATION MATERIALS...

Open the catalog to page 3

MATERION ADVANCED MATERIALS GROUP is an industry leader in microelectronic packaging for the semiconductor; MEMS, wireless & LED markets. We manufacture lids, frames, solder & braze alloys, precious metal targets, and evaporation materials to meet the broadest range of customer requirements. In addition to developing innovative packaging products, we offer related services to support your business needs including precision parts cleaning, precious metals refining & recycling, and sputtering target bonding. ADVANCED MATERIALS GROUP 2978 Main Street Buffalo, NY 14214 USA Phone: +1 800.3271355 [email protected] www.materion.com/advancedmaterials...

Open the catalog to page 4

MEMS Materials

MEMS Materials

Catalog excerpts

All Materion Brush Ltd catalogs and technical brochures