Aluminum Scandium Sputter Targets

Product catalog summary

Introduction
Advanced Materials Group presents a solution for enhancing thin film-based piezoelectric MEMS (pMEMS) sensors and devices, which are increasingly used in electronic devices like Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) and Energy Harvesting Devices. The performance of these devices is significantly improved by using doped aluminum nitride piezoelectric films, particularly those highly doped with scandium.

Challenge
The development of high-quality aluminum scandium sputter targets has been a challenge, hindering the fabrication of pMEMS devices. These targets are crucial for manufacturing nitride films through reactive sputtering.

Solution
Materion has developed a melt-based process to produce Aluminum-Scandium sputter targets with high chemical uniformity, low oxygen content, and 3N purity. These targets are tailored for reactive deposition of nitride piezoelectric materials, with scandium contents available up to 21at% (31wt%) and future availability up to 44at% (57wt%).

Advantages of Materion Al-Sc Sputter Targets

Consistent stoichiometry across the target and through its thickness
Purity greater than 99.9%
Controlled microstructure for optimal sputter performance
Manufactured by vacuum casting for fully dense targets with low oxygen and contaminant levels

Materion Benefits

Global facilities and fully staffed R&D
Redundant manufacturing capabilities
Composition and purity analysis
OEM partnerships and multiple bonding techniques
International quality certifications

MEMS Applications

Energy harvesting
Piezoelectric micromachined ultrasonic transducer (PMUT) array-based devices, including fingerprint, chemical, fat sensors, and gesture control devices
Medical sensors for blood pressure, kidney functions, blood analysis, respiratory monitoring, and drug delivery

Contact Information
Materion Corporation, Advanced Materials Group, 2978 Main Street, Buffalo, NY 14214 USA. Phone: +1 800.327.1355. Email: [email protected]. Website: www.materion.com/advancedmaterials

Catalog excerpts

ADVANCED MATERIALS GROUP Aluminum Scandium Sputter Targets

Open the catalog to page 1

PIEZOELECTRIC MATERIALS FOR THIN FILM APPLICATIONS MATERION BENEFITS World's premier advanced materials products and services company ■ Global facilities ■ Fully staffed R&D ■ Redundant manufacturing capabilities ■ Composition and purity analysis ■ OEM partnerships ■ Multiple bonding techniques International quality certifications MEMS APPLICATIONS ■ Energy harvesting ■ Piezoelectric micromachined ultrasonic transducer (PMUT) array-based devices including fingerprint sensors, chemical sensors, fat sensors and gesture control devices ■ Medical sensors - blood pressure, kidney functions, blood...

Open the catalog to page 2

Aluminum Scandium Sputter Targets

Aluminum Scandium Sputter Targets

Catalog excerpts

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