QUANTAX FlatQUAD
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QUANTAX FlatQUAD • EDS for SEM with the XFlash® FlatQUAD Innovation with Integrity

QUANTAX FlatQUAD is the EDS microanalysis system based on the revolutionary XFlash® FlatQUAD. This special annular four-channel silicon drift detector is inserted between SEM pole piece and sample, achieving maximum solid angle in EDS. In combination with the ESPRIT analytical software suite QUANTAX FlatQUAD provides previously unheard of mapping performance, even for the most difficult samples. Employing latest detector technology The XFlash® FlatQUAD, the core of QUANTAX FlatQUAD, is based on a novel detector concept. This includes positioning the detector from the side between pole piece...

...with the XFlash® FlatQUAD Best solid angle in EDS for SEM Detector layout The position and size (4 × 15 mm2 active area) of the detector chips provide the largest solid angle for X-ray collection in a SEM. Depending on the specific geometrical conditions more than 1 sr is possible in combination with a high take-off angle of 60° or more. This schematic shows the annular arrangement of the four detector segments. Their active area is approximately kidney-shaped to provide optimum solid angle and detector resolution at the same time. The anode and on-chip preamplifier are positioned to one...

QUANTAX FlatQUAD is an EDS micro-and nano-analysis system that performs where conventional systems reach limitations: ■ Extremely fast mapping at highest output count rate, using only moderate beam currents ■ Analysis of beam-sensitive materials at low to extremely low beam currents (< 10 pA), e.g. of biological or semiconductor samples ■ Investigation of samples with topography, avoiding shadowing effects ■ Analysis of nanoparticles and nanostructures at low kV and highest magni fication ■ Measurement of thin samples (e.g. TEM lamellae) and other specimens with low X-ray yield. Fast...

Thanks to the extremely large solid angle of the XFlash® FlatQUAD, QUANTAX FlatQUAD supports convenient analysis of samples that are difficult or even impossible to investigate using conventional systems, as it already starts performing with beam currents in the pA range: ■ Sensitive samples can be analyzed with out electron beam damage. ■ Non-conducting specimens can be investigated under high vacuum without carbon coating. Compared to low vacuum analysis, this approach reduces hydrocarbon contamination and avoids beam skirting effects. ■ Samples with low carbon content can be analyzed, as...

Analysis of samples with complex topography Standard EDS detectors are at a disadvantage when it comes to mapping samples with topography, as their view from one side restricts them from detecting radiation from all parts of the sample – shadowing occurs. The XFlash® FlatQUAD with its 4 detector segments positioned directly above the specimen is affected far less by this phenomenon. This permits complete investigation of all sample areas hit by the electron beam. Micro impact crater (a) Overlay of backscattered electron image and map of Mg, S, and Ca of an artificial impact micro crater...

Meeting the Most Difficult Analytical Challenges Specimens with low X-ray yield Its excellent collection efficiency allows the XFlash® FlatQUAD to analyze samples that provide only low X-ray yield and still deliver excellent analytical results. Apart from biological samples these can be thin samples of all kinds. (a) SE image of agglomerates of SiO2 nanoparticles covered with an organic dye at roughly 100,000× magnification. The green rectangle indicates the area mapped with the XFlash® FlatQUAD. (Sample courtesy: S. Rades, K.Natte, T. Behnke, BAM Federal Institute for Materials Research...

Technical specifications of the XFlash® FlatQUAD For further information scan the QR code or visit www.bruker.com/quantax # Bruker Nano GmbH Berlin ■ Germany Phone +49 (30) 670990-0 Fax +49 (30) 670990-30 info.bna@bruker.com www.bruker.com Bruker Nano is continually improving its products and reserves the right to change specifications without notice. ©2015 DOC-B82-EXS012, Rev. 1.2.